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National Repository of Grey Literature 1 records found  Search took 0.00 seconds. 
General methodology for high temperature processes of semiconductor technology by the finite element methods
 Jirásek, Vít ; Potocký, Štěpán ; Sveshnikov, Alexey
A general methodology for modeling of high-temperature reactors produced by SVCS Process Innovation, Ltd., using the finite element, resp. finite volume method, was developed. The methodology covers basics principles of working with SW packages for CFD modeling with the emphasis on the strongly coupled processes of chemically reacting fluid flow, mass and heat transport. An important part is devoted to the model-experiment relationship, verification and validation of models and comparison with experiments.
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